A1D00116065
GEM Data Interface SIPLACE F5 HM, (M54) Version 407.xx Communication pro tocol via Ethernet LAN to transmit production data. Control/record produ ction, control/record process parameters between a host computer and SIP LACE F5 HM placement station. Complete implementation of the GEM standar d to SEMI while complying with the GEM compliance statement.
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